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Onto Innovation Completes Strategic Investment in Rigaku Holdings Corporation

  • Onto Innovation Inc. completed its acquisition of a 27% minority equity stake in Rigaku Holdings Corporation from Atom Investment, L.P.
  • The transaction value was 113,078,356,600 billion yen, equivalent to approximately US$720 million.
  • This investment deepens a strategic collaboration first announced in April 2026 to advance X-ray technologies for semiconductor manufacturing process control.
  • Onto Innovation will apply the fair value option method for accounting purposes without consolidating Rigaku's financial results.
  • Onto Innovation will nominate a director to serve on Rigaku's board of directors.
  • The partnership aims to address challenges in 3D architectures & exotic materials to support next-generation semiconductor technologies.